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Nanospec 6100
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The NanoSpec 6100 (Model 6100) is an automated film thickness measurement system that measures film thickness on semiconductor wafers. The NanoSpec 6100 uses a spectrophotometer with a regulated tungsten halogen lamp and optional deuterium UV source. The NanoSpec 6100 has a measurement range of 25–200,000 Å and an optional UV system from 25 Å to 500 Å.[1]
How it works
The NanoSpec 6100 includes an automatic wafer loader that can handle wafers from a cassette. The system uses a motorized stage that can move to predefined measurement points according to a stage program. Before each measurement, the system performs a reference scan to ensure accurate calibration. The instrument is controlled by software that includes both an operations mode for production and an engineering mode for advanced configuration.[1]
What do the numbers mean?
Wafer handling1
Optics & imaging3
Control & software1
Configuration & options6
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Model 6150 | — | — | Stage accommodates an optional automatic loader (Model 6150 stage). | cores.research.utdallas.edu[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of system is the NanoSpec 6100?
The NanoSpec 6100 is an automated film thickness measurement system.[1]
What measurement technique does the NanoSpec 6100 use?
The NanoSpec 6100 uses optical reflectometry to measure film thickness.[3]
Does the NanoSpec 6100 have an automatic wafer loader?
Yes, the system includes an automatic wafer loader that handles wafers from a cassette.[1]
Not publicly documented
The following facts about the Nanospec 6100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Nanospec 6100 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Nanospec 6100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Nanospec 6100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Nanospec 6100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Nanospec 6100 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]cores.research.utdallas.edu — cores.research.utdallas.educores.research.utdallas.edu
- [2]Inventory photo
- [3]https://arxiv.org/pdf/2207.04411 — arxiv.orgarxiv.org
Last updated Sep 26, 2026.