Novellus
300
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Statistical Process control
- equipment fault monitoring and notification
- sensor integration
- remote connectivity for e-diagnostics
- advanced factory automation
What do the numbers mean?
Optics & imaging1
- Platform function
- High-resolution data collection and management, advanced equipment applications, advanced factory automation, and remote e-diagnostics connectivity[1]
Control & software4
- AKB capabilities
- Statistical Process control, equipment fault monitoring and notification, sensor integration, and remote connectivity for e-diagnostics[1]
- AFA standards and interfaces
- SEMI standards for Equipment Data Acquisition (EDA) "Interface A"; connections to Modbus and HSMS[1]
- AR function
- Enables access to the Novellus tool GUI and the ATHENA KB GUI from a computer outside of the cleanroom[1]
Configuration & options2
- Modules
- Athena Knowledge Base (AKB), Athena Advanced Factory Automation (AFA), Athena Remote (AR)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is ATHENA?
ATHENA is software for Novellus 300 mm tools that use the Proteus user interface.[1][2]
What are the main modules in ATHENA?
The three modules are Athena Knowledge Base (AKB), Athena Advanced Factory Automation (AFA), and Athena Remote (AR).[1][2]
Not publicly documented
The following facts about the 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 300 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]Novellus - ATHENA — web.archive.orgweb.archive.org
Last updated Sep 25, 2026.
Compare with similar tools
View all →Despatch 300mm-Ofen is a 300mm thermal process tool for clean processing.
Tokyo Electron NS300Z is a scrubber system for 300mm wafers, featuring process modules with proven reliability and stability, and offering further productivity improvements.
The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
