Nikon
NSR SF 130
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Nikon NSR SF 130 is an i-line stepper operating at a wavelength of 365 nm. The NSR SF 130 supports 200 mm wafer exposure with a numerical aperture of approximately 0.50. The NSR SF 130 achieves a throughput of about 100 wafers per hour.[1]
How it works
The NSR SF 130 is built on Nikon's stepper platform with precision optics optimized for i-line lithography. The system uses high-quality projection lenses to ensure uniform illumination and critical dimension control. The wafer stage incorporates interferometer-based positioning for sub-micron alignment accuracy. Automation features include motorized reticle loaders, wafer handling robots, and SMIF pods for particle-free transport. The control electronics run proprietary Nikon software for recipe management and diagnostics.[1]
What do the numbers mean?
Wafer handling4
- Stage and Alignment
- Precision wafer stage with interferometer-based positioning, sub-micron alignment accuracy[1]
Optics & imaging3
Control & software1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What is the exposure wavelength of the NSR SF 130?
The exposure wavelength is 365 nm, in the i-line region.[1]
What is the maximum wafer size it can handle?
The maximum wafer size is 200 mm.[1]
What numerical aperture does it have?
The numerical aperture is approximately 0.50.[1]
What is its typical throughput?
Typical throughput is around 100 wafers per hour, depending on process conditions.[1]
Not publicly documented
The following facts about the NSR SF 130 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR SF 130 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR SF 130 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR SF 130 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR SF 130 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR SF 130 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]junr.com.cn — junr.com.cnjunr.com.cn
- [2]Equipment inventory listing
Last updated Oct 1, 2026.