Nikon

NSR 2005 i 10 i-Line

Lithography Nikon NSR 2005 i 10 i-Line family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Nikon NSR 2005 i 10 i-Line is a lithography stepper.^[1]^[2]

How it works

General reference — not yet source-verified

A lithography stepper exposes a wafer through a mask or reticle using projected light so that resist on the wafer receives the pattern image.

A stepper performs the exposure field by field across the wafer instead of exposing the full wafer image at once.

Where it fits in the process flow

General reference — not yet source-verified

The Nikon NSR 2005 i 10 i-Line sits in the wafer patterning stage of the front-end fabrication flow.

The Nikon NSR 2005 i 10 i-Line is used after resist coating and prior to development and subsequent etch or implant steps that follow pattern transfer.

Applications

General reference — not yet source-verified

A lithography stepper is used for patterned circuit formation on semiconductor wafers.

A lithography stepper is also used wherever repeated mask-defined exposure of photoresist is needed in microfabrication.

What do the numbers mean?

Configuration & options4

OEM: Nikon^[1]
Model: NSR 2005 i 10^[1]
Tool type: i-line stepper^[1]
Category: Lithography^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR 2005 i 10 i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2005 i 10 i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2005 i 10 i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2005 i 10 i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2005 i 10 i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2005 i 10 i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report