MPI

PM100

Test & Probe 6"MPI PM100 family

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MPIPM100

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Wafer size

Power

Electrical testing on wafers or chips^[1]

What is it?

The MPI TS150 Probe Station is described as equipment for electrical testing on wafers or chips, with up to 4 independent terminals plus additional chuck grounding. The chuck is compatible with wafer sizes up to 6 inch, chip, or part of wafers, and the probe tips are mounted on true X,Y,Z micro-positioners identified as MPI PM100.

What can it run?

Process applications and technology nodes documented for this tool.

Electrical testing
On-chip probing
Wafer probing
DC characterization
AC characterization

Why won't it start?

Documented failure modes, common issues, and field considerations.

Maximum DC voltage is limited to +/- 40 V during measurement.

What do the numbers mean?

Power & electrical1

Use: Electrical testing on wafers or chips^[1]

Wafer handling3

Terminal capacity: Maximum of 4 independent terminals + additional chuck grounding^[1]
Wafer compatibility: Up to 6 inch wafers^[1]
Chuck stage: Fine-glide chuck stage on highly stable granite base^[1]

Configuration & options4

Equipment: MPI TS150 Probe Station^[1]
Probe positioners: MPI PM100 true X,Y,Z micro-positioners^[1]
Probe tips: Interchangeable tungsten (W) contact tips^[1]
Travel range: 150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

UseElectrical testing on wafers or chips^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the PM100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PM100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PM100 are on record.
Answerable by: an OEM parts catalog or a service engineer