Waferpedia

MKS

D 13449

MKS D 13449 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

MKSD 13449
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What it is

The MKS D 13449 is an HDP microwave magnetron head used in semiconductor processing equipment.[2]

Where it fits in the process flow

The D 13449 is a replacement or spare part rather than a standalone process tool.[1][2]

What do the numbers mean?

Configuration & options4

Make
MKS[1]
Accurate?
Model
D 13449[1]
Accurate?
Asset #
84176[1]
Accurate?
Configuration & options
2 R, for AMAT P 5200[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What equipment is the MKS D 13449 associated with?

The D 13449 is an HDP microwave magnetron head for the AMAT P 5200 platform.[2]

Not publicly documented

The following facts about the D 13449 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the D 13449 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the D 13449 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the D 13449 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the D 13449 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the D 13449 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 3, 2026.

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