MKS
AX 7665 22 L RPS
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The MKS AX 7665 22 L RPS is a remote plasma source (RPS) unit used in semiconductor manufacturing equipment.[1]
How it works
General reference — not yet source-verifiedRemote plasma sources generate a stable plasma discharge in a chamber separate from the process chamber, using a power supply (often RF or microwave) to excite a process gas into a plasma state.
The excited species—free radicals, ions, and neutral atoms—are then transported downstream into the main process chamber to react with a substrate surface or clean chamber walls.
Where it fits in the process flow
General reference — not yet source-verifiedRemote plasma sources are integrated into chemical vapor deposition (CVD), atomic layer deposition (ALD), and etch equipment to enable plasma-enhanced processes at lower substrate temperatures.
The MKS AX 7665 22 L RPS typically serves as a component within a larger process tool, supplying activated species to the process chamber downstream of the plasma generation region.
Applications
General reference — not yet source-verifiedRemote plasma sources like the AX 7665 22 L RPS are employed for downstream cleaning processes in semiconductor fabrication, including chamber cleaning, photoresist stripping, and surface preparation.
What do the numbers mean?
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the AX 7665 22 L RPS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AX 7665 22 L RPS are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AX 7665 22 L RPS are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AX 7665 22 L RPS are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AX 7665 22 L RPS are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AX 7665 22 L RPS is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 30, 2026.
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