MKS
The 627H operates on the capacitance manometer principle, using a metal diaphragm that deflects in response to applied pressure. The diaphragm is heated and maintained at a constant 45°C temperature, which helps minimize the effects of ambient thermal variations on measurement accuracy. The sensor is fully welded and leak-checked, with the process gas contained within the sensor even in case of diaphragm failure.[1]
Typical application areas include plasma-based processes such as chemical vapor deposition and etching, where maintaining a specific process pressure is essential for film uniformity and etch rate control. The sensor may also be used in physical vapor deposition, as well as in any vacuum chamber where real-time pressure monitoring is required to ensure process repeatability.[1]
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The 627H has a full scale range of 0.02 to 25,000 Torr (2.67 to 3.33 x 10^6 Pa).[1]
The 627H provides an accuracy of 0.12% or 0.15% of reading, depending on the model configuration.[1]
The overpressure limit is 45 psia (310 kPa) or 120% of full scale, whichever is greater.[1]
The 627H operates with a temperature control of 45°C.[1]
The following facts about the 627H are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 627H are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 627H are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 627H are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 627H are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 627H is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 22, 2026.