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Mattson

SHS 2800 RTA

SHS 2800 RTA — Inventory photo
Fig. 01SHS 2800 RTAInventory photo[1]

What is it?

The Mattson SHS 2800 RTA is a rapid thermal anneal system described with front-end or tool-controller configurations, a ripple pyrometer for temperature measurement, and a jet venturi cooling system.

What do the numbers mean?

Power & electrical1

Voltage
380 V, 63.0 A, 50/60 Hz, 3 Phase[1]
Accurate?

Control & software4

Tool controller with Win7 (Updated 2018)[1]
Accurate?
Remonte controller backside with monitor and keyboard[1]
Accurate?
Tool controller with Win7 (Updated 2019)[2]
Accurate?
Remote controller backside with monitor and keyboard[2]
Accurate?

Configuration & options4

Front End[1]
Accurate?
Temperature measurement with Ripple Pyrometer[1]
Accurate?
High cooling with Jet Venturi System[1]
Accurate?
Process
Oxid (BPSG + RTP)[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage380 V, 63.0 A, 50/60 Hz, 3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SHS 2800 RTA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SHS 2800 RTA are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SHS 2800 RTA are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SHS 2800 RTA are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SHS 2800 RTA are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SHS 2800 RTA is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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