LEO
1450 VPSE
The LEO 1450 VPSE is a variable-pressure scanning electron microscope (VP-SEM) designed for metrology and inspection. The LEO 1450 VPSE operates with an accelerating voltage from 0.2 kV to 30 kV and achieves a resolution of 3.5 nm at 30 kV in high vacuum mode. The LEO 1450 VPSE integrates an EDAX EDS microanalysis detector and a four-quadrant BSE detector for compositional analysis.[1][2][3]
What it is
The LEO 1450 VPSE is a variable-pressure scanning electron microscope used for metrology and inspection.[1]
The LEO 1450 VPSE integrates a mounted EDAX energy-dispersive X-ray spectroscopy microanalysis detector and a KE Development Type 200 four-quadrant backscattered electron detector system.[3][1]
How it works
The LEO 1450 VPSE supports accelerating voltage from 0.2 kV to 30 kV and variable-pressure operation from 1 Pa to 400 Pa.[1]
The LEO 1450 VPSE uses a tungsten hairpin filament electron source and includes an Everhart-Thornley secondary electron detector, a variable-pressure secondary electron detector, and a four-quadrant backscattered electron detector system.[1][2]
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical1
Vacuum & pumping7
Optics & imaging13
- Compositional Imaging
- KE Development Type 200 Four-Quadrant Backscattered Electro (BSE) Detector system with manual insertion control rod[3]
- Dedicated terminal running SmartSEM column control software[3]
- Standalone closed-loop recirculating liquid laboratory lens chiller[3]
- BSE detector
- KE Development Type 200 Four-Quadrant Backscattered Electron Detector system with manual insertion control rod[3]
- BSE detector
- KE Development Type 200 four-quadrant backscattered electron (BSE) detector system with manual insertion control rod[3]
Control & software2
Dimensions & facilities1
Configuration & options14
- Active Isolation Platform:[3]
- Integrated Kinetic Systems Vibraplane pneumatic active vibration dampening table frame[3]
- Secondary Analytical Terminal:[3]
- Dedicated HP terminal[3]
- Paired with a standalone EDAX Genesis[3]
- 7000 processing tower module[3]
- Complete Utility Loop:[3]
- Active isolation platform
- Integrated Kinetic Systems Vibraplane pneumatic active vibration dampening table frame[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationVariable Pressure SEM Platform[3]
- ConfigurationFloor-mounted Edwards RV mechanical rotary vane roughing/backing vacuum pump[3]
- Accelerating voltage0.2 kV to 30 kV[2]
- Resolution (high vacuum)3.5 nm at 30 kV[2]
- Variable pressure range1 Pa to 400 Pa[2]
- DetectorsEverhart Thornley SE detector, Variable Pressure Secondary Electron (VPSE) detector[2]
- Vacuum pumpFloor-mounted Edwards RV mechanical rotary vane roughing/backing vacuum pump[3]
- Tool typeVariable-pressure scanning electron microscope (VP-SEM)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the accelerating voltage range of the LEO 1450 VPSE?
What is the variable-pressure range of the LEO 1450 VPSE?
The LEO 1450 VPSE operates from 1 Pa to 400 Pa in variable-pressure mode.[1][2]
What detectors are included on the LEO 1450 VPSE?
The LEO 1450 VPSE includes an Everhart-Thornley secondary electron detector, a variable-pressure secondary electron detector, a mounted EDAX EDS microanalysis detector, and a KE Development Type 200 four-quadrant backscattered electron detector system.[3][1][2]
Not publicly documented
The following facts about the 1450 VPSE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1450 VPSE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 1450 VPSE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1450 VPSE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1450 VPSE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1450 VPSE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]espie-electronic.com — espie-electronic.comespie-electronic.com
- [3]Inventory photo
- [4]1450 VP — LEO | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 7, 2026.
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