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Lam Research

Concept Two Dual Sequel

DepositionLam Research Concept Two family
Research Quality: 40% complete
Concept Two Dual Sequel — Inventory photo
Fig. 01Concept Two Dual SequelInventory photo[1]

Power

208 V[5]

Vacuum

MKS[3]

Gas delivery

NSRTBD, Gas Box Config[3]

What it is

The Concept Two Dual Sequel is designed for 8 inch (200 mm) wafers. The system operates on 208 V, 50/60 Hz, three-phase power, with a full load current of 10 A and a maximum component current of 5 A.[3][5]

What do the numbers mean?

Power & electrical5

Voltage
208 V[5]
Accurate?
50/60 Hz[5]
Accurate?
Phase
3 Phase[5]
Accurate?
Voltage / Frequency / Phase
208 V, 50/60 Hz, 3 Phase[5]
Accurate?
Max Component Current
5 Amp[5]
Accurate?

Vacuum & pumping1

Pressure Control
MKS[3]
Accurate?

Wafer handling3

Wafer Substrate
Silicon[3]
Accurate?
Wafer Cassette
Entegris FA 200-8 MT 7902[3]
Accurate?
Wafer Size
8 inch[3]
Accurate?

Gas & chemistry2

NSRTBD, Gas Box Config[3]
Accurate?
Category
Chemical Vapor Deposition (CVD)[3]
Accurate?

Control & software4

Software Version & Build
Sequel 4.94 B 38[3]
Accurate?
User Interface Option
SMIF Ready[3]
Accurate?
User Interface Options
Cleanroom (Right Side)[3]
Accurate?
Software Version
Sequel 4.94 B 38[3]
Accurate?

Dimensions & facilities1

Facilities Kits
Bottom[3]
Accurate?

Configuration & options18

RPC (2)[3]
Accurate?
Flat Type
Semi Notched[3]
Accurate?
DLVM Mfg Type
Refurb - SSEMVIT[3]
Accurate?
PM 2 (Left)
Sequel[3]
Accurate?
PM 2 (Left) Mfg Type
Refurb - SSEMVIT[3]
Accurate?
PM 3 (Center)
Sequel[3]
Accurate?
PM 3 (Center) Mfg Type
Refurb - SSEMVIT[3]
Accurate?
PM 4 (Right)
Blank-Off[3]
Accurate?
Cable Length
75 ft[3]
Accurate?
DLCM:[3]
Accurate?
Front End Option
SMIF Ready[3]
Accurate?
Paddle and Arc Kits
STD[3]
Accurate?
Cool Station Options
4 Shelf Cool Station[3]
Accurate?
Particle Check Options
Particle Sensor Manifold[3]
Accurate?
QTY
3 Systems (Single shrink chamber and dual standard chamber)[4]
Accurate?
Full Load Current
10 A[5]
Accurate?
Showerhead Material
AL 6061[3]
Accurate?
Manometers
Heated[3]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationNSRTBD, Gas Box Config[3]
  • Voltage208 V[5]
  • Configuration50/60 Hz[5]
  • Phase3 Phase[5]
  • CategoryChemical Vapor Deposition (CVD)[3]
  • Voltage / Frequency / Phase208 V, 50/60 Hz, 3 Phase[5]
  • Max Component Current5 Amp[5]
  • Pressure ControlMKS[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Concept Two Dual Sequel support?

The Concept Two Dual Sequel supports 8 inch (200 mm) wafers.[3]

What are the electrical power specifications of the Concept Two Dual Sequel?

The system requires 208 V, 50/60 Hz, three-phase power, with a full load current of 10 A and a maximum component current of 5 A.[5]

What chamber configurations are available for the Concept Two Dual Sequel?

The system can be configured with a single shrink chamber and dual standard chambers.[4]

Not publicly documented

The following facts about the Concept Two Dual Sequel are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept Two Dual Sequel are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Concept Two Dual Sequel are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Concept Two Dual Sequel are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Concept Two Dual Sequel are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Concept Two Dual Sequel is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]Equipment inventory listing
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Last updated Sep 24, 2026.

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