Lam Research
Alliance 6 9400 PTX
The Lam Research Alliance 6 9400 PTX is an etcher for 8-inch wafers. The Alliance 6 9400 PTX can be configured with up to three poly etch chambers.[1][2][3]
What it is
How it works
General reference — not yet source-verifiedPlasma etch systems remove material from a wafer surface using a chemically reactive plasma generated in a vacuum chamber.
Where it fits in the process flow
The Alliance 6 9400 PTX is used for poly etch, a process that removes polysilicon to form transistor gates.[3]
What do the numbers mean?
Power & electrical4
- 50/60 Hz[3]
Vacuum & pumping1
- No Chiller or Pumps included[3]
Wafer handling1
Optics & imaging1
Control & software1
Configuration & options13
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Alliance 6 9400 PTX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance 6 9400 PTX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alliance 6 9400 PTX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alliance 6 9400 PTX are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alliance 6 9400 PTX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alliance 6 9400 PTX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]inventory listing
- [3]Inventory photo
Last updated Sep 30, 2026.
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