Lam Research
2300 e 6 Kiyo EX Polysilicon
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam 2300 e 6 Kiyo EX Polysilicon is an etcher. The Lam 2300 e 6 Kiyo EX Polysilicon is categorized as Etch.[1][2]
What it is
The Lam Research 2300 e 6 Kiyo EX is a polysilicon etcher.[1]
How it works
General reference — not yet source-verifiedIons and reactive radicals from the plasma bombard the wafer surface, selectively etching the exposed polysilicon while masking layers protect other regions.
The tool uses a combination of radio-frequency power applied to electrodes to sustain the plasma and control ion energy, enabling precise control over etch rate and profile.
Where it fits in the process flow
General reference — not yet source-verifiedThe tool typically follows a photolithography step that defines the gate pattern and precedes doping or subsequent dielectric deposition.
What do the numbers mean?
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2300 e 6 Kiyo EX Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 e 6 Kiyo EX Polysilicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 e 6 Kiyo EX Polysilicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 e 6 Kiyo EX Polysilicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 e 6 Kiyo EX Polysilicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 e 6 Kiyo EX Polysilicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 4, 2026.
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