Lam Research
2300 e 4 Kiyo MCX Metal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research 2300 e 4 Kiyo MCX Metal is an etch tool manufactured by Lam Research. The 2300 e 4 Kiyo MCX Metal is used for metal etching in semiconductor manufacturing.[1][2]
What it is
Where it fits in the process flow
General reference — not yet source-verifiedMetal etch is typically performed after the metal layer has been deposited and patterned with photoresist. The etch system removes exposed metal from the field areas, leaving the metal lines or vias defined by the mask. Downstream steps include resist strip and cleaning.
What do the numbers mean?
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 2300 e 4 Kiyo MCX Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 e 4 Kiyo MCX Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 e 4 Kiyo MCX Metal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 e 4 Kiyo MCX Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 e 4 Kiyo MCX Metal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 e 4 Kiyo MCX Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]2300 e 4 Kiyo MCX Metal — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 23, 2026.
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