KLA

UV 1050 Film Thickness

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KLAUV 1050 Film Thickness

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What it is

The KLA Prometrix UV 1050 is a thin film measurement tool. The tool uses broadband UV optics and dual beam spectrophotometry.^[4]^[1]^[2]^[3]^[5]

How it works

The KLA Prometrix UV 1050 uses a broadband xenon arc lamp as its light source. The tool employs dual beam spectrophotometry to measure film thickness. The stage has a resolution of 0.25 µm in x-y and 0.025 µm in z. The system features automatic focus on the measurement site.^[1]^[2]^[3]^[5]

What do the numbers mean?

Wafer handling1

Wafer sizes: 100 mm, 125 mm, 150 mm, 200 mm^[3]

Optics & imaging5

Optics type: Broadband UV^[1]
Stage resolution (xy): 0.25 µm^[2]
Stage resolution (z): 0.025 µm^[2]
Number of discrete wavelengths: over 500^[1]
Imaging system: Color camera^[1]

Control & software2

Operating system: Windows NT^[1]
Software: Summit Software with GUI^[1]

Configuration & options3

Measurement technique: Dual beam spectrophotometry^[1]
Light source: Broadband Xenon Arc Lamp^[1]
Focus: Automatic focus on measurement site^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Prometrix UV 1050 handle?

The system supports wafer sizes of 100 mm, 150 mm, and 200 mm.^[1]^[2]^[5]

What light source is used in the Prometrix UV 1050?

The system uses a broadband xenon arc lamp.^[1]^[2]^[3]^[5]

What measurement technique does the Prometrix UV 1050 use?

The tool uses dual beam spectrophotometry.^[1]^[2]^[5]

What operating system does the Prometrix UV 1050 use?

The system runs on Windows NT.^[1]^[2]^[5]

Not publicly documented

The following facts about the UV 1050 Film Thickness are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UV 1050 Film Thickness are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UV 1050 Film Thickness are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UV 1050 Film Thickness are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the UV 1050 Film Thickness are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the UV 1050 Film Thickness is not on record.
Answerable by: an OEM datasheet or a fab qualification report