KLA
Profilm 3 D Optical
What it is
The KLA Profilm 3 D Optical is a non-contact optical profilometer for three-dimensional surface topography measurement.[4][3]
The Profilm 3 D Optical is part of the KLA Instruments metrology and inspection category.[5]
How it works
Where it fits in the process flow
The Profilm 3 D Optical fits in metrology and inspection workflows where surface form, step height, roughness, and other topographic features are measured after fabrication or processing.[3]
Applications
The Profilm 3 D Optical measures step height, surface roughness, trench and via depth, dimensions, particles, grains, volume, bearing ratio, and flatness.[3]
What do the numbers mean?
Vacuum & pumping4
- UPG-PSI Upgrade Profilm acquisition system to - PSI capability[1]
- Measurement principle
- Vertical Scanning Interferometry (VSI) and Phase-Shifting Interferometry (PSI)[2]
- Model configuration
- OBJ-10X-Mirau 10x Nikon Mirau interferometric objective lens; WSProfilm3D-200 manual rotating (r-theta) stage for 200mm wafers; Profilm-AnalysisSoftware permanent license; UPG-PSI upgrade; Accurion Nano30 active vibration isolation system; stitching not included[1]
Wafer handling1
- WSProfilm3D-200 Manual rotating (r-theta) stage for 200mm wafers[1]
Optics & imaging3
- OBJ-10X-Mirau 10x Nikon Mirau interferometric objective lens[1]
Control & software3
Dimensions & facilities3
- SHS-CrOnSi-Multi-4um Step-height standard with 4um, 2um, and 100nm steps[1]
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationUPG-PSI Upgrade Profilm acquisition system to - PSI capability[1]
- Measurement principleVertical Scanning Interferometry (VSI) and Phase-Shifting Interferometry (PSI)[2]
- Thickness range (PSI)0 – 3 µm[2]
- Model configurationOBJ-10X-Mirau 10x Nikon Mirau interferometric objective lens; WSProfilm3D-200 manual rotating (r-theta) stage for 200mm wafers; Profilm-AnalysisSoftware permanent license; UPG-PSI upgrade; Accurion Nano30 active vibration isolation system; stitching not included[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Profilm 3 D Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Profilm 3 D Optical are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Profilm 3 D Optical are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Profilm 3 D Optical are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Profilm 3 D Optical are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Profilm 3 D Optical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]instrumenthive.com — instrumenthive.cominstrumenthive.com
- [3]kla.com — kla.comkla.com
- [4]Filmetrics Profilm3D Optical Profilometers | KLA Instruments — kla.comkla.com
- [5]Profilm 3 D Optical — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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