Waferpedia

KLA

OP 5220 Film Thickness Measurement

KLA OP family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

KLAOP 5220 Film Thickness Measurement
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What it is

The KLA OP 5220 Film Thickness Measurement is a film thickness measurement tool.[1]

The OP 5220 is a KLA / Therma-wave model.[2]

What do the numbers mean?

Configuration & options4

Tooling, lamp Spectral Cal[1]
Accurate?
Model
OP 5220[2]
Accurate?
Make
KLA / Therma-wave[2]
Accurate?
Description
Film Thickness Measurement[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the KLA OP 5220 Film Thickness Measurement?

The KLA OP 5220 Film Thickness Measurement is a film thickness measurement tool.[1]

Not publicly documented

The following facts about the OP 5220 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OP 5220 Film Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the OP 5220 Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the OP 5220 Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the OP 5220 Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the OP 5220 Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
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Last updated Oct 11, 2026.

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