KLA
Archer AIM+ Overlay
What it is
Where it fits in the process flow
General reference — not yet source-verifiedThe Archer AIM+ sits in the metrology step that follows photolithography patterning and before the etch process. Overlay measurements are used to qualify the lithography process and to feed correction data back to the lithography tool. Correcting overlay errors in real time reduces rework and maintains pattern placement accuracy for subsequent layers.
What do the numbers mean?
Power & electrical1
- New System power supplies[1]
Vacuum & pumping1
- New Pneumatic panel valves & Air / Vac / Exhaust lines fitted[1]
Wafer handling8
- Robot Handler Options:[1]
- The system can be configured with all handler types[1]
- Dual port 200mm open handler[1]
- Dual port 200mm SMIF handler[1]
- Dual port 300mm Phoenix Yaskawa handler[1]
- Handler Options
- Dual port 200mm open handler, Dual port 200mm SMIF handler, Dual port 300mm Phoenix Yaskawa handler, Triple port 300mm Phoenix Kawasaki handler[1]
Optics & imaging1
- Refurbished AMS camera assembly[1]
Control & software2
- Refurbished system PC with new hard-drives[1]
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the KLA Archer AIM+ support?
The KLA Archer AIM+ supports eight inch and twelve inch wafer sizes.[2]
What robotic handler options are available for the Archer AIM+?
The Archer AIM+ can be configured with a dual port 200 mm open handler, a dual port 200 mm SMIF handler, a dual port 300 mm Phoenix Yaskawa handler, or a triple port 300 mm Phoenix Kawasaki handler.[1]
Not publicly documented
The following facts about the Archer AIM+ Overlay are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Archer AIM+ Overlay are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Archer AIM+ Overlay are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Archer AIM+ Overlay are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Archer AIM+ Overlay are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Archer AIM+ Overlay is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]Equipment inventory listing
- [4]Equipment inventory listing
- [5]Equipment inventory listing
Last updated Sep 29, 2026.
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