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KLA

4PP-TypeG

KLA 4PP-TypeG family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

4PP-TypeG — store.kla-instruments.com
Fig. 014PP-TypeGstore.kla-instruments.com[1]

What it is

The KLA 4PP-TypeG is a four-point probe used for sheet resistance measurement.[2][1][3]

The 4PP-TypeG is a KLA probe accessory for use with Filmetrics R50 and R54 4PP measurement systems.[2]

How it works

The 4PP-TypeG has 0.6 mm spacing, a 100 um tip radius, and 100 gm probe force.[3][2]

Where it fits in the process flow

The 4PP-TypeG is intended for general purpose implantation measurement.[3][2]

Applications

The 4PP-TypeG is used for general purpose implantation measurement.[3][2]

The 4PP-TypeG is used in sheet resistance measurement workflows.[3][2]

What do the numbers mean?

Configuration & options6

Product family
4PP (four-point probe)[1]
Accurate?
Tip Spacing
0.6 mm[2]
Accurate?
Tip Radius
100 µm[2]
Accurate?
Contact Force
100 gm[2]
Accurate?
Material
230-0919[2]
Accurate?
Compatible Measurement Systems
Filmetrics R50, Filmetrics R54[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of tool is the KLA 4PP-TypeG?

The KLA 4PP-TypeG is a four-point probe.[1][2][3]

What measurement task is it used for?

The KLA 4PP-TypeG is used for sheet resistance measurement.[2][3]

What probe geometry is given for the 4PP-TypeG?

The 4PP-TypeG has 0.6 mm spacing and a 100 um tip radius.[3][2]

What probe force is given for the 4PP-TypeG?

The 4PP-TypeG has 100 gm probe force.[3][2]

What system is it intended to be used with?

The 4PP-TypeG is for use with Filmetrics R50 and R54 4PP measurement systems.[2]

Not publicly documented

The following facts about the 4PP-TypeG are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4PP-TypeG are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 4PP-TypeG are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 4PP-TypeG are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4PP-TypeG are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4PP-TypeG is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
  2. [2]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
  3. [3]4PP-TypeG - CN Tech — cntech.co.ukcntech.co.uk
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Last updated Oct 6, 2026.

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