Hitachi
S 9300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Power
6kVA Single Phase[2]
Gas delivery
Nitrogen, Oil free Air (OFA), PCW Glycol[3]
Optics
1000x to >300000x[3]
What it is
The S 9300 is a critical-dimension scanning electron microscope (CD-SEM). The system is classified as a metrology and inspection tool.[4][3]
How it works
The S 9300 employs a Schottky emission electron gun. The accelerating voltage is adjustable from 500V to 1600V in 10V steps. The electron optical system uses a three-stage electromagnetic lens and a two-stage electromagnetic deflection coil. Astigmatism correction is performed by an eight-pole electromagnetic coil. The probe current is 4 to 24pA with automated setting and measurement by Faraday cup. The field of view is 1.2mm. The depth of focus is at least 1.0µm at 80000x magnification. Resolution is 3nm at 800V in retarding/boosting mode. Magnification ranges from 1000x to greater than 300000x.[3]
Where it fits in the process flow
The S 9300 handles 200mm wafers and is convertible to 300mm with a conversion kit. The system includes a 200mm wafer handling system with two cassette holders equipped with ergo flippers. The wafer imaging covers X from 5 to 295mm and Y from 5 to 195mm. The system also supports notch-down alignment.[3][2]
What do the numbers mean?
Power & electrical5
Vacuum & pumping1
- Objective Lens
- 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum[3]
Wafer handling7
- Wafer Handling System
- 200mm Wafer Handling System, (2) Cassette holders with ergo flippers, Convertible to 300mm with conversion kit[3]
Gas & chemistry1
Optics & imaging3
Control & software5
Configuration & options20
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Thermo Fisher Scientific FEI Quanta 450 FEG— Same function class: Metrology & Inspection, nullCompare in depthsource[5]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power requirement6kVA Single Phase[2]
- Accelerating voltage500V to 1600V, 10V steps[3]
- Electromagnetic Lens3-Stage Electromagnetic Lens with boosting voltage[3]
- Objective Lens4 opening click stop, heated aperture is selectable/adjustable outside the vacuum[3]
- Field control methodContinuously on for sample decharging at all voltages[3]
- Resolution3nm (800V) Retarding/Boosting Mode[3]
- Chemicals UsedNitrogen, Oil free Air (OFA), PCW Glycol[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of data does this class of machine provide?General reference — not yet source-verified
Depending on the sensing method, it can provide images, dimensional measurements, surface-condition information, or defect-location data.
What kinds of samples are inspected?General reference — not yet source-verified
Such systems are used on semiconductor and other precision-manufactured parts with small features, fine patterns, or sensitive surface conditions.
Not publicly documented
The following facts about the S 9300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9300 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]ptwsingapore.com — ptwsingapore.comptwsingapore.com
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
- [4]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [5]Equipment inventory listing
Last updated Sep 28, 2026.
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