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Hitachi

HF3300

Metrology & InspectionHitachi HF3300 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Hitachi HF3300 is a transmission electron microscope. The Hitachi HF3300 is also capable of scanning transmission electron microscopy. The Hitachi HF3300(S) Megascope is a 300 kV high-resolution analytical transmission electron microscope.[1][2]

Hitachi logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)
  • Plate 01300 kV in situ SEM/STEM observation of Pt/C catalysts using a Hitachi HF-3300 microscope.

    Hitachi High-Tech GlobalTVWatch on YouTube

Power

300 kV[3]

Gas delivery

Air, O2, H2O vapor, CO2, and H2[3]

Optics

0.13 nm[3]

What is it?

The Hitachi HF3300(S) is a transmission electron microscope available as the TEM-14 instrument at the Harvard CNS facility.

What do the numbers mean?

Power & electrical1

Accelerating voltage
300 kV[3]
Accurate?

Gas & chemistry1

Gas flow injection
Air, O2, H2O vapor, CO2, and H2[3]
Accurate?

Optics & imaging6

TEM resolution
0.13 nm[3]
Accurate?
STEM resolution
0.1 nm[3]
Accurate?
Detectors
Annular dark field (ADF) detector and bright field (BF) detector[3]
Accurate?
EDS
Dual Oxford energy dispersive X-ray spectroscopy detectors[3]
Accurate?
EELS
Electron energy loss spectroscopy detector[3]
Accurate?
Microscopy capabilities
High resolution Lorentz microscopy and electron holography[3]
Accurate?

Configuration & options9

Instrument Type
Transmission electron microscope (TEM)[2]
Accurate?
Instrument Code
TEM-14[2]
Accurate?
Facility Section
Charge Beam Imaging[2]
Accurate?
Tool designation
Hitachi HF3300(S) Megascope[2]
Accurate?
Model
HF3300(S)[3]
Accurate?
Manufacturer
Hitachi[3]
Accurate?
Instrument type
Transmission electron microscope[1]
Accurate?
Mode capability
Scanning transmission electron microscopy (STEM)[3]
Accurate?
In-situ heating
Possible with a Norcada heating holder with biasing contacts[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Accelerating voltage300 kV[3]
  • Gas flow injectionAir, O2, H2O vapor, CO2, and H2[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What are the TEM and STEM resolutions specified for the HF3300?

The TEM resolution is 0.13 nm and the STEM resolution is 0.1 nm.[4]

Not publicly documented

The following facts about the HF3300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HF3300 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HF3300 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HF3300 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HF3300 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HF3300 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]osti.gov — osti.govosti.gov
  2. [2]cns1.rc.fas.harvard.edu — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
  3. [3]bioz.combioz.com
  4. [4]Transmission Electron Microscope Imaging Service—Hitachi HF3300(S) Megascope - CD BioSciences — laboratory.cd-biosciences.comlaboratory.cd-biosciences.com
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Last updated Oct 11, 2026.

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