Filmetrics
F80-T
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Filmetrics F80-T is a film thickness mapping system for patterned wafers that uses Thickness Imaging technology. The F80-T collects thousands of thickness readings in the vicinity of the measurement location to generate a thickness image. The F80-T is designed for CMP, CVD, PVD, and Wafer Track Process Engineers and offers ultra-fast measurements as fast as 15 points in 21 seconds.[1][2]
What it is
How it works
The F80-T generates a thickness image by collecting many thickness readings near the measurement location. The system differs from conventional single-spot metrology by mapping thickness over an area rather than reporting one point.[1]
The F80-T was available in configurations ranging from manual load tabletop systems to fully automated standalone cassette-to-cassette tools.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThickness mapping is used after film deposition and before later process steps that depend on film thickness control. The class is relevant to monitoring patterned surfaces in semiconductor lines and related thin-film processes.
What can it run?
Process applications and technology nodes documented for this tool.
- Patterned wafers
- CMP process engineering
- CVD process engineering
- PVD process engineering
- Wafer track process engineering
What do the numbers mean?
Configuration & options3
- Measurement method
- Collects thousands of thickness readings in the vicinity of the measurement location[1]
Vintage & configurations
- 2010Production start[2]
Introduced
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does the F80-T measure?
The F80-T measures film thickness on patterned wafers and generates a thickness image.[1][2]
What measurement approach does the F80-T use?
The F80-T uses Thickness Imaging technology and collects many thickness readings near the measurement location.[1][2]
How does the F80-T differ from conventional metrology tools?
The F80-T maps thickness over an area, while conventional metrology tools measure thickness at a single spot.[1]
Not publicly documented
The following facts about the F80-T are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the F80-T are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F80-T are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F80-T are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F80-T is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F80-T are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 9, 2026.