Edwards
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The Edwards XDS 10 is an oil-free dry scroll vacuum pump that uses a patented bearing shield to isolate the vacuum environment from lubricants. The Edwards XDS 10 provides a maximum displacement of 13.4 m³/h at 60 Hz and an ultimate total pressure of 6×10⁻² mbar. The Edwards XDS 10 features an adjustable three-position gas-ballast control for pumping condensable vapors.[1][2]

A patented bearing shield isolates the vacuum environment from all forms of lubricant, making the pump both dry and hermetically sealed.[1]
The XDS 10 is used in applications including scanning electron microscopes, ion implanters, sputtering systems, leak detectors, glove boxes, freeze drying, and general clean pumping tasks.[1]
The XDS 10 is designed for pumping condensable vapors and uses materials selected for a wide range of laboratory wet chemistry applications.[1]
The pump is used for automotive, beam lines and high energy physics, centrifuges, coating, cryogenics, degassing, distillation, extraction, filtration, freeze drying, furnaces, gel drying, laboratory bench top vacuum, lasers, rare gas re-circulation, refrigeration, research and development, rotary and centrifugal evaporators, surface science instruments, and solvent recovery.[5]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Edwards XDS 10 (1-phase 115/230 V, North America) | — | — | Single-phase motor configured for 115 V or 230 V supply, pre-set to 115 V for North America; part number A72601906. | idealvac.com[1] |
| Edwards XDS 10 (1-phase 115/230 V, Europe/UK) | — | — | Single-phase motor configured for 115 V or 230 V supply, pre-set to 230 V for Europe/UK; part number A72601903. | idealvac.com[1] |
| Edwards XDS 10 (1-phase 100/200 V, Japan) | — | — | Single-phase motor configured for 100 V or 200 V supply, pre-set to 200 V for Japan; part number A72601904. | idealvac.com[1] |
| Edwards XDS 10 (3-phase 200/380/415/460 V) | — | — | Three-phase motor, voltage configurable to 200–230 V or 380–460 V, pre-set to 380–460 V; part number A72601905. | idealvac.com[1] |
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The displacement of the Edwards XDS 10 at 60 Hz operation is 13.4 m³h⁻¹.[1]
The ultimate vacuum of the Edwards XDS 10 at 60 Hz operation is 4.5 × 10⁻² Torr.[5][1]
Available motor voltages include 115-120/230-240 V for single-phase 60 Hz, 200-230/380-460 V for three-phase 60 Hz, and 100/200 V for single-phase 50 Hz.[5][1][4]
The Edwards XDS 10 uses KF25 connections for both the inlet and exhaust.[5]
The following facts about the XDS 10 Scroll are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XDS 10 Scroll are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the XDS 10 Scroll are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the XDS 10 Scroll are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the XDS 10 Scroll is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the XDS 10 Scroll are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Last updated Sep 24, 2026.