Waferpedia

Edwards

IXH 1210

Lab & Support EquipmentEdwards IXH family
Research Quality: 20% complete
IXH 1210 — Inventory photo
Fig. 01IXH 1210Inventory photo[1]

Power

3-200-230V[1]

Vacuum

dry pump[2]

What is it?

What do the numbers mean?

Power & electrical4

Input
3-200-230V[1]
Accurate?
50/60 Hz[1]
Accurate?
Input
3-200-230V, 50/60 Hz, 28A[1]
Accurate?
System power at ult
3.2 kW[3]
Accurate?

Vacuum & pumping6

Type
dry pump[2]
Accurate?
Type
dry semiconductor vacuum pump[3]
Accurate?
Exhaust
KF40[2]
Accurate?
Pumping speed
603.29 CFM[2]
Accurate?
Ultimate pressure
3.7 x 10-3 Torr[2]
Accurate?
Dry pump size
100 m3/h[3]
Accurate?

Dimensions & facilities2

Weight
948 lbs[2]
Accurate?
Weight
413 kg[3]
Accurate?

Configuration & options12

Type
NRY 4 JC 000 XS[1]
Accurate?
28A[1]
Accurate?
Manufacturer
Edwards[1]
Accurate?
Model
IXH 1210[1]
Accurate?
Inlet
ISO100[2]
Accurate?
Peak speed
1025 m3/h[3]
Accurate?
Typical water flow
4.2 l/m[3]
Accurate?
Inlet connection
ISO 100[3]
Accurate?
Outlet connection
NW 40[3]
Accurate?
Purge flow range
28/44* /60 slm[3]
Accurate?
Condition
new[1]
Accurate?
Vintage
2016[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Input3-200-230V[1]
  • Configuration50/60 Hz[1]
  • Typedry pump[2]
  • Typedry semiconductor vacuum pump[3]
  • Input3-200-230V, 50/60 Hz, 28A[1]
  • ExhaustKF40[2]
  • Pumping speed603.29 CFM[2]
  • Ultimate pressure3.7 x 10-3 Torr[2]
  • Dry pump size100 m3/h[3]
  • System power at ult3.2 kW[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the IXH 1210 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IXH 1210 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IXH 1210 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IXH 1210 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IXH 1210 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IXH 1210 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]provac.comprovac.com
  3. [3]ajvs.comajvs.com
Was this page accurate?

Last updated Oct 7, 2026.

Compare with similar tools

View all →