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Disco

F DFP 8160 Fully Automated

CMPDisco F DFP 8160 Fully Automated family
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F DFP 8160 Fully Automated — Inventory photo
Fig. 01F DFP 8160 Fully AutomatedInventory photo[1]

What is it?

The Disco F DFP 8160 Fully Automated Polisher is a fully automated polisher for 8-inch to 12-inch wafers.

What do the numbers mean?

Power & electrical2

Voltage
200VAC - 3 Phase[1]
Accurate?
50/60Hz, Full Load Amps
57A[1]
Accurate?

Dimensions & facilities1

Cooling Water
0.2MPa. 4Lmin[1]
Accurate?

Configuration & options4

Spindle Max. Revolution
3000min.[1]
Accurate?
Air
0.5MPa.[1]
Accurate?
550L/min(ANR)[1]
Accurate?
Cutting Water
0.3MPa. 20L/min[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage200VAC - 3 Phase[1]
  • 50/60Hz, Full Load Amps57A[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F DFP 8160 Fully Automated are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F DFP 8160 Fully Automated are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the F DFP 8160 Fully Automated are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the F DFP 8160 Fully Automated are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F DFP 8160 Fully Automated are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F DFP 8160 Fully Automated is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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