Waferpedia

Disco

DFL7340

Dicing & Grinding200mmDisco DFL7340 family
Research Quality: 60% complete

The Disco DFL7340 is a stealth dicing system for silicon wafer dicing. The Disco DFL7340 is dedicated to dicing Si wafers only. The Disco DFL7340 supports a maximum sample diameter of 200 mm.[1][2][3]

DFL7340 — confluence.nanofab.ualberta.ca
Fig. 01DFL7340confluence.nanofab.ualberta.ca[2]

Wafer size

200mm

Performance

3 µm[3]

Optics

SDE03 engine with λ = 1342 nm[2]

What it is

The Disco DFL7340 is a model used for silicon wafer dicing in dedicated packaging-area equipment sets.[2][3]

How it works

The Disco DFL7340 uses a stealth dicing engine with a wavelength of 1342 nm.[2]

Where it fits in the process flow

The Disco DFL7340 is used for dicing silicon wafers and supports topside or backside dicing through tape.[2]

The Disco DFL7340 is intended for contactless dicing of silicon wafers in packaging assembly laboratory use.[3]

Applications

The Disco DFL7340 is dedicated to dicing Si wafers only, and the compatible wafer size is up to 200 mm in diameter.[2]

  • Dicing silicon wafers
  • Stealth dicing of Si substrates

What do the numbers mean?

Wafer handling9

Compatible materials
Si wafers only[2]
Accurate?
Process
Laser stealth dicing of Si wafers[3]
Accurate?
Compatible material
Si wafers only[2]
Accurate?
Street clearance requirement
Wafer must be metal-free in a width of 0.4 × substrate thickness, centered on the dicing street[4]
Accurate?
Category
Packaging & Bonding / Wafer Dicing / Stealth Dicer[3]
Accurate?
Compatible materials
Dedicated to dicing Si wafers only (SDE03 engine with λ = 1342 nm)[2]
Accurate?
Wafer sizes supported
200mm wafers or smaller (6in, 4in, 3in, coupon, wafer quarter)[3]
Accurate?
Maximum wafer thickness
Up to 1.5 mm thick wafers[3]
Accurate?
Process purpose
Laser stealth dicing of Si wafers[3]
Accurate?

Optics & imaging8

Stealth dicing engine
SDE03 engine with λ = 1342 nm[2]
Accurate?
Laser engine wavelength
λ = 1342 nm[2]
Accurate?
Process wavelength
IR[3]
Accurate?
Surface roughness requirement
Dicing streets must be smooth (mirror polish) on the surface where the laser is incident[4]2 sources
Accurate?
Backside alignment
IR camera for back side alignment[3]
Accurate?
Laser wavelength
1342 nm (IR)[2]
Accurate?
Laser type
ns-pulsed near infrared laser[1]
Accurate?
IR camera for back side alignment
IR camera for back side alignment[3]
Accurate?

Performance2

Position accuracy
3 µm[3]
Accurate?
Position accuracy, X-axis & Y-axis
3 µm[3]
Accurate?

Configuration & options15

Model
DFL7340[2]
Accurate?
OEM
Disco[2]
Accurate?
Process area
Packaging[2]
Accurate?
Maximum sample diameter
200 mm[2]
Accurate?
Dicing orientation
Topside or backside (through tape) dicing possible[2]
Accurate?
Category
Packaging & Bonding[4]
Accurate?
Feeding speed
1.0–1000 mm/s[3]
Accurate?
Si resistivity requirement
ρ > 0.01 Ω•cm[4]2 sources
Accurate?
Automation mode
Fully automated mode[3]
Accurate?
Vendor
Disco[2]
Accurate?
Stealth dicing engine
SDE03[1]
Accurate?
Dicing sides
Topside or backside (through tape) dicing possible[2]
Accurate?
Feeding speed, X-axis & Y-axis
1.0 – 1000 mm/s[3]
Accurate?
Operation mode
Fully automated mode[3]
Accurate?
At the nanoFAB
Staff processing only; user training not offered on this tool[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What material is the Disco DFL7340 dedicated to dicing?

The Disco DFL7340 is dedicated to dicing silicon wafers only.[2]

What wafer diameter can the Disco DFL7340 handle?

The Disco DFL7340 supports wafers up to 200 mm in diameter.[2]

Does the Disco DFL7340 support backside dicing?

The Disco DFL7340 supports backside dicing through tape.[2]

Not publicly documented

The following facts about the DFL7340 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL7340 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFL7340 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFL7340 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFL7340 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFL7340 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.ualberta.ca — nanofab.ualberta.cananofab.ualberta.ca
  2. [2]confluence.nanofab.ualberta.ca — confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  3. [3]c2mi.ca — c2mi.cac2mi.ca
  4. [4]waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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