Denton Vacuum
BTT IV Thermal
The Denton Vacuum BTT IV Thermal is a benchtop turbo high-vacuum thermal evaporation system. The Denton Vacuum BTT IV Thermal is configured with one thermal evaporative source. The Denton Vacuum BTT IV Thermal has a quartz bell jar with implosion guard measuring 12" diameter by 18" high.[1][2]
What it is
The Denton Vacuum BTT IV Thermal is a benchtop thermal evaporation deposition system. The machine belongs to the deposition category and uses a turbo high-vacuum configuration.[1][2][4]
The BTT IV Thermal is configured with one thermal evaporative source. The machine includes a crystal film thickness monitor option, a touch screen PLC controller, and a quartz bell jar with implosion guard.[1][2][4]
How it works
The BTT IV Thermal uses a high-vacuum turbo pump with a roughing pump built into the system base. The machine also includes an automatic pumpdown and venting sequence with manual overrides, plus an automatic filament evaporation cycle.[1][3]
The BTT IV Thermal has an integrated touch screen control panel. The machine also includes an LN two cold trap and a high vacuum valve.[3]
Where it fits in the process flow
What do the numbers mean?
Power & electrical2
Vacuum & pumping6
- Turbo High Vacuum[1]
- High vacuum turbo pump with roughing pump built in system base[1]
- System features
- Integrated touch screen control panel; automatic pumpdown and venting with manual overrides; automatic control of filament evaporation cycle; high vacuum valve; LN 2 cold trap clean[3]
Control & software2
- Touch Screen PLC Controller[1]
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage208 V, Single Phase, 50/60 Hz, 20 A[1]
- ConfigurationTurbo High Vacuum[1]
- ConfigurationHigh vacuum turbo pump with roughing pump built in system base[1]
- Power208 V, Single Phase, 50/60 Hz, 20 A[1]
- VacuumTurbo High Vacuum[1]
- Ultimate vacuum5*10-6 torr[3]
- Vacuum system70 l/sec turbomolecular pump, oil mechanical pump[3]
- System featuresIntegrated touch screen control panel; automatic pumpdown and venting with manual overrides; automatic control of filament evaporation cycle; high vacuum valve; LN 2 cold trap clean[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the BTT IV Thermal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BTT IV Thermal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the BTT IV Thermal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the BTT IV Thermal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the BTT IV Thermal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the BTT IV Thermal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]eicn.cnsi.ucla.edu — eicn.cnsi.ucla.edueicn.cnsi.ucla.edu
- [4]Denton Vacuum BTT IV Thermal family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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