Dektak
6 M Stylus
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Dektak 6M can detect step heights up to 1 mm and down to 5 nm.[2]
The scan length ranges from 50 µm to 30 mm.[2]
Stylus force is adjustable from 9.8 mN to 147 mN.[2]
The instrument supports substrates up to 150 mm in diameter and up to 31 mm thick.[2]
The stylus tip radius is 12 micrometers.[3]
Horizontal resolution can be adjusted to well less than 0.1 micrometers depending on scan speed and scan length.[3]
How it works
Where it fits in the process flow
General reference — not yet source-verifiedStylus profilometers are used in semiconductor and thin-film processing to measure step heights, film thickness, and surface roughness after deposition, etching, or polishing steps.
The instrument is typically located in a metrology laboratory or cleanroom and can be used for both research and production monitoring.
Applications
Typical applications include measurement of etch rates, deposition rates, and film growth rates; measurement of surface roughness; and thickness mapping.[2]
The Dektak 6M can measure both hard materials such as silicon, silicon oxide, silicon nitride, and metal films on rigid substrates, and soft materials such as photoresists and other polymers.[3]
What do the numbers mean?
Optics & imaging4
Performance1
Dimensions & facilities1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum step height the Dektak 6M can measure?
The Dektak 6M can measure step heights up to 1 mm.[2]
What is the vertical resolution of the Dektak 6M?
The vertical resolution is 0.1 nm, and the point-to-point resolution is 1 angstrom.[2][3]
What are the typical applications of the Dektak 6M?
Typical applications include measurement of etch rates, deposition rates, film growth rates, surface roughness, and thickness mapping.[2]
Not publicly documented
The following facts about the 6 M Stylus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6 M Stylus are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6 M Stylus are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6 M Stylus are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6 M Stylus are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6 M Stylus is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Last updated Sep 26, 2026.
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