Waferpedia

CEE

300 X Spin

CEE 300 X Spin family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

300 X Spin — Inventory photo
Fig. 01300 X SpinInventory photo[1]

How it works

The CEE 300 X Spin supports a variety of process parameters including pre-wet steps, snap spin, ramp to spin profiles of 1 second or 5 seconds, exhaust control, and static or dynamic dispense methods.[2]

The CEE 300 X Spin can be configured with a sealed lid to maintain a solvent-rich environment in the bowl, preventing premature drying of the coating material.[2]

The CEE 300 X Spin can be used with an IDI Model 450 pump or an IDI 600 pump for material dispense, depending on the application requirements.[2]

Applications

The CEE 300 X Spin has been characterized for coating Shipley 1813 photoresist to a total thickness variation of 0.61% at a target thickness of 1.28 microns on 300 mm silicon wafers.[2]

The CEE 300 X Spin has been characterized for coating AZ 4620 photoresist to a total thickness variation of 0.63% at a target thickness of 9.11 microns on 300 mm silicon wafers.[2]

The CEE 300 X Spin has been characterized for coating SU-8 3025 permanent epoxy negative photoresist to a total thickness variation of 1.81% at a target thickness of 39.49 microns on 300 mm silicon wafers.[2]

The CEE 300 X Spin has been characterized for coating AZ 5214 image reversal photoresist to a total thickness variation of 0.84% at a target thickness of 1.64 microns on 300 mm silicon wafers.[2]

What do the numbers mean?

Wafer handling1

Wafer size
300 mm[2]
Accurate?

Configuration & options1

Total thickness variation
<1% (demonstrated for specific materials)[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 300 X Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the 300 X Spin are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 300 X Spin are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 300 X Spin are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 300 X Spin are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 300 X Spin are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]costeffectiveequipment.com — costeffectiveequipment.comcosteffectiveequipment.com
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Last updated Oct 7, 2026.

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