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CEE

100 Spinner

CEE 100 Spinner family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The CEE 100 Spinner is a spin coater designed to apply uniform films to substrates. The CEE 100 Spinner accepts substrate sizes up to 6 inches. The CEE 100 Spinner stores up to ten programmable presets for spin program automation.[1]

100 Spinner — Inventory photo
Fig. 01100 SpinnerInventory photo[2]

What it is

The CEE 100 is designed to apply uniform films to substrates. The CEE 100 can store ten programmable presets. Each program on the CEE 100 can have up to ten steps.[1][3]

How it works

The CEE 100 allows programming of acceleration rate, held speed, and step time for each step. Acceleration can be set from 1 to 30000 rpm/s. Speed can be set from 1 to 6000 rpm. Step time can be set from 1 to 999 seconds.[1]

What do the numbers mean?

Wafer handling1

Wafer Size
Up to 6 inches (152.4 mm)[3]
Accurate?

Configuration & options6

Spin Speed Range
1 to 6000 RPM[1]
Accurate?
Acceleration Range
1 to 30000 RPM/s[1]
Accurate?
Step Time Range
1 to 999 seconds[1]
Accurate?
Programmable Presets
10[3]
Accurate?
Steps per Program
Up to 10 steps[3]
Accurate?
Available Spin Chucks
2.25 inches (57.2 mm) and 0.3125 inches (7.9 mm)[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the speed range of the CEE 100?

The held angular speed can be set from 1 to 6000 rpm.[1]

What is the acceleration range of the CEE 100?

The acceleration rate can be set from 1 to 30000 rpm/s.[1]

How many programmable presets does the CEE 100 store?

The CEE 100 can store ten programmable presets.[1]

How many steps can each program on the CEE 100 have?

Each program on the CEE 100 can have up to ten steps.[1][3]

Not publicly documented

The following facts about the 100 Spinner are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 100 Spinner are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 100 Spinner are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 100 Spinner are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 100 Spinner are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 100 Spinner is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.ku.edu — nanofab.ku.edunanofab.ku.edu
  2. [2]Inventory photo
  3. [3]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
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Last updated Sep 26, 2026.

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