Bruker

Dektak XT

Metrology & Inspection 2 in, 4 in, 6 in, 8 in Bruker Dektak family

Research Quality: 60% complete

The Bruker Dektak XT is a stylus surface profiler. The Bruker Dektak XT measures thin and thick film step heights. The Bruker Dektak XT is compatible with wafer sizes of 2 inches, 4 inches, 6 inches, and 8 inches.^[1]

Dektak XT — Inventory photo — Fig. 01Dektak XTInventory photo^[2]

Plate 01Bruker Dektak XT Demo at IES Technical Sales Danvers MA
davesatiesWatch on YouTube
Plate 02DektakXT Stylus Profiler [Application Training Instructional Session]
Kamal A. Shair Central Research Science LaboratoryWatch on YouTube
Plate 03DektakXT Intro Short length.wmv
davesatiesWatch on YouTube

Wafer size

2 in, 4 in, 6 in, 8 in

Performance

5 Å^[1]

Optics

Selectable 1 to 4 mm FOV^[1]

What it is

General reference — not yet source-verified

Surface profilers are contact metrology instruments that measure surface topography by dragging a stylus across a sample. The vertical displacement of the stylus is converted into an electrical signal, typically by a linear variable differential transformer (LVDT).

How it works

The DektakXT takes measurements by moving a diamond-tipped stylus over the sample surface at a user-programmed scan length, speed, and stylus force. The stylus is linked to a Linear Variable Differential Transformer (LVDT), which produces electrical signals corresponding to surface variations.^[7]

The stylus force on the Dektak XT is adjustable from 0.03 mg to 15 mg. The system includes a video camera for manual stylus placement and a manual X, Y, Theta stage.^[8]

Applications

The Dektak XT supports 3D stress and 3D mapping. Software analysis can determine roughness, average step height, and other parameters. A stress measurement option is included.^[9]^[8]

What do the numbers mean?

Wafer handling4

Wafer compatibility: 2 in, 4 in, 6 in, 8 in^[1]
Compatible wafer sizes: 2", 4", 6", 8"^[1]
Wafer Compatibility: 2″, 4″, 6″, 8″ wafers^[1]
Wafer compatibility: 2", 4", 6", and 8" wafers^[1]

Optics & imaging3

Magnification / Field of View: Selectable 1 to 4 mm FOV^[1]
Selectable magnification: 1 to 4mm FOV^[1]
Field of View Magnification: Selectable, 1 to 4mm FOV^[1]

Performance2

Step-height repeatability: 5 Å^[1]
Step-height repeatability: 5A^[1]

Control & software2

4" Stage and movement controlled by software^[2]

Accurate?

Windows 7 PC^[2]

Accurate?

Dimensions & facilities2

Measurement type: Stylus surface profiler for thin and thick film step height^[1]
Measurement purpose: advanced thin and thick film step height measurement^[1]

Configuration & options12

Stylus diameter: 12.5 Microns^[2]; Enclosure included^[2]
Scan length range: 55 mm (with stitching option)^[1]
Vertical range: 1 mm^[1]
Low force (N-Lite+): 0.03 to 15 mg^[1]
3D capabilities: 3D stress and 3D mapping^[1]
N-Lite+ Low Force: 0.03 to 15mg^[1]
3D stress and 3D mapping: Supported^[1]
Tool Type: Stylus surface profiler^[1]
Type: stylus surface profiler^[1]
Low force mode: N-Lite+ Low Force with 0.03 to 15mg^[1]
Measurement modes: 3D stress and 3D mapping^[1]

Interested in this tool?

Need help with this tool?Embed spec card

What replaced it?

siblingKLA D600— Listed in the same metrology equipment section.source^[5]
siblingKLA P-17— Listed in the same mechanical profilometers section of EPFL's Center of MicroNanoTechnology.source^[6]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the vertical measurement range of the Dektak XT?

The vertical measurement range is up to 1 mm.^[9]^[8]

What is the step height repeatability?

Step height repeatability is 5 Å (Angstroms).^[9]

What is the maximum sample diameter the Dektak XT can accommodate?

The maximum sample diameter is 8 inches (200 mm).^[8]

What is the adjustable stylus force range?

The stylus force is adjustable from 0.03 mg to 15 mg.^[8]

What software does the Dektak XT use?

The system uses Vision64 measurement and analysis software.^[7]

What is the maximum scan length?

The maximum scan length is 55 mm (2.16 inches).^[8]

Not publicly documented

The following facts about the Dektak XT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak XT are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dektak XT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dektak XT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dektak XT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dektak XT is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (10)Every fact above is drawn from these public sources

[1]epfl.chepfl.ch
[2]Inventory photo
[3]Inventory photo
[4]Inventory photo
[5]epfl.chepfl.ch
[6]epfl.chepfl.ch
[7]Surface profiler [BRUKER-profilometer] | Quantum-Nano Fabrication and Characterization Facility | University of Waterloo — uwaterloo.cauwaterloo.ca
[8]Step Profilometer (DektakXT) - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
[9]Metrology ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
[10]Equipment Descriptions | Stanford Nano Shared Facilities — snsf.stanford.edusnsf.stanford.edu