Waferpedia

Bruker

contour-R1

Precision OpticsBruker contour-R1 family
Research Quality: 30% complete

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Brukercontour-R1
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Vacuum

<0.1 nm[2]

Optics

Optical Profiler[1]

What it is

The Bruker Contour-R1 is an optical profiler designed for non-contact three-dimensional surface characterization.[3]

How it works

The system includes a motorized X-Y stage, a 150 mm maximum sample diameter, and a 100 mm maximum sample height. Objectives of 10× and 50× are mounted on a software-controlled turret, with field-of-view lenses of 0.55× and 2×. A stitching algorithm combines multiple images into a single larger area scan. The system is operated via the Vision64 software package.[2]

What do the numbers mean?

Vacuum & pumping2

Vertical resolution (PSI mode)
<0.1 nm[2]
Accurate?
Measurement modes
Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI)[2]
Accurate?

Wafer handling1

Purpose
Optical (non-contact) 3D surface characterization of a wide range of substrates and devices[2]
Accurate?

Optics & imaging9

Equipment type
Optical Profiler[1]
Accurate?
Measurement principle
Optical (non-contact) 3D surface characterization; uses interference microscopy[2]
Accurate?
Vertical resolution (VSI mode)
~3 nm[2]
Accurate?
Objectives
10X and 50X on a software controlled motorized turret[2]
Accurate?
Field of view (FOV) lens
0.55X and 2X[2]
Accurate?
Model
Contour Elite I 3D optical metrology system[2]
Accurate?
Description
Optical profiler capable of generating three dimensional surface scans of a wide range of materials and devices[2]
Accurate?
Measurement principle
Fast, non-contact technique based on optical interference[2]
Accurate?
Objectives
10X and 50X objectives mounted on a software-controlled motorized turret[2]
Accurate?

Control & software2

Software
Vision64 for automation and analysis[2]
Accurate?
Software
Vision64 software package for automation and analysis[2]
Accurate?

Dimensions & facilities2

Max. sample height
100 mm[2]
Accurate?
Maximum sample height
100 mm[2]
Accurate?

Configuration & options9

Equipment identifier
Inert-BRUKER-contour-R1[1]
Accurate?
Max. sample diameter
150 mm[2]
Accurate?
Max. single measurement area
1.0 mm x 1.0 mm (with stitching for larger areas)[2]
Accurate?
Stage type
Motorized X-Y stage[2]
Accurate?
Additional capabilities
Stitching algorithm for combining multiple images; handles rough surfaces, abrupt steps, slopes >60°, and low reflectance <0.5%[2]
Accurate?
Vendor
Bruker[2]
Accurate?
Stage
Motorized X-Y stage positioning[2]
Accurate?
Maximum sample size
150 mm diameter[2]
Accurate?
FOV lenses
0.55X and 2X[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Vertical resolution (PSI mode)<0.1 nm[2]
  • Measurement modesVertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI)[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Is this class of machine used to modify parts?General reference — not yet source-verified

No. Machines of this class are used to inspect and quantify surfaces rather than to change the workpiece.

Why is this class important in optics work?General reference — not yet source-verified

Optical components depend on tightly controlled surface quality, so this class of instrument helps confirm that the surface geometry and texture meet required standards.

Not publicly documented

The following facts about the contour-R1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the contour-R1 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the contour-R1 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the contour-R1 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the contour-R1 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the contour-R1 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
  2. [2]uwaterloo.ca — uwaterloo.cauwaterloo.ca
  3. [3]RAC1 Bruker Contour Profiler [BRUKER-contour-R1] — Plone site — qnfcf.uwaterloo.caqnfcf.uwaterloo.ca
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Last updated Oct 3, 2026.

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