Waferpedia

ASML

XT 1250 D

LithographyASML XT 1250 D family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

ASML logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The ASML XT 1250 D is a lithography scanner used in semiconductor manufacturing.[2][1]

The ASML XT 1250 D is an ArF tool.[2][1]

How it works

General reference — not yet source-verified

A lithography scanner transfers a patterned image from a reticle onto a wafer by exposing photoresist through projection optics.

Where it fits in the process flow

General reference — not yet source-verified

A lithography scanner sits in the pattern-transfer step of the wafer fabrication flow.

Applications

General reference — not yet source-verified

Lithography scanners are used to define circuit patterns on wafers for semiconductor device fabrication.

What do the numbers mean?

Wafer handling4

Wafer size
6 inch[3]
Accurate?
Wafer stage
Dual chuck[3]
Accurate?
Wafer configuration
Dry[3]
Accurate?
Carrier handler type
Mark I 300 FOUP[3]
Accurate?

Optics & imaging1

Reticle stage measurement system
Heidenhain encoders[3]
Accurate?

Configuration & options5

ArF[1]
Accurate?
Manufacturer
ASML[2]
Accurate?
Model
XT 1250 D[2]
Accurate?
Category
Lithography[1]
Accurate?
Light source
Cymer XLA165[3]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the XT 1250 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XT 1250 D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XT 1250 D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XT 1250 D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XT 1250 D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XT 1250 D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 5, 2026.

Compare with similar tools

View all →