ASML
PAS 2000
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The PAS 2000 is a wafer stepper that was ASML's first lithography product. The PAS 2000 used oil pressure to move the wafer, which caused leakage. The PAS 2000 achieved a critical dimension between 1.0 and 1.3 micron and an overlay accuracy of 0.25 micron.[1][2][3]
How it works
Applications
- Production of integrated circuits
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Commercial and technical failure
- Oil-pressure wafer movement had a tendency to leak
What do the numbers mean?
Vacuum & pumping3
Performance1
Dimensions & facilities1
Configuration & options1
Vintage & configurations
What replaced it?
Related models
- successorASML PAS 5500— ASML developed the PAS 5500 after the PAS 2000; the PAS 5500 became the company's first commercial breakout.source[1]
- successorASML PAS 2400— The PAS 2400 was an improvement over the PAS 2000, which had used oil pressure and was a commercial and technical failure.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What was the ASML PAS 2000?
The ASML PAS 2000 was ASML's first product, a wafer stepper used in semiconductor photolithography.[1][2]
When was the PAS 2000 introduced?
The PAS 2000 was introduced in 1984.[3]
Not publicly documented
The following facts about the PAS 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the PAS 2000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PAS 2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PAS 2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PAS 2000 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the PAS 2000 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
- [2]chiphistory.org — chiphistory.orgchiphistory.org
- [3]PAS 2000 — ASML | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [4]PAS 2000 Wafer Stepper by ASML product specification & brochure — chiphistory.orgchiphistory.org
Last updated Oct 10, 2026.
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