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Applied Materials

Vantage Radiance Plus RTP

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Vantage Radiance Plus RTP — Inventory photo
Fig. 01Vantage Radiance Plus RTPInventory photo[1]

What is it?

Applied Materials Vantage Radiance Plus RTP System is a rapid thermal process system with 2 chambers.

What do the numbers mean?

Wafer handling2

Wafer size
(2) 25-wafer ADOE FOUP Load ports[1]
Accurate?
Wafer handling
(2) 25-wafer ADOE FOUP Load ports[3]
Accurate?

Control & software1

Factory Interface
5.3[3]
Accurate?

Configuration & options4

2 chambers[2]
Accurate?
Chambers
2[2]
Accurate?
Version
300 mm[4]
Accurate?
Vintage
01.06.2010[5]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

How many chambers does the Vantage Radiance Plus RTP have?

The system has two chambers.[2]

What is the load port configuration of the Vantage Radiance Plus RTP?

The tool uses two 25-wafer ADOE FOUP load ports.[3]

What control software does the Vantage Radiance Plus RTP run?

The system runs Factory Interface 5.3.[3]

Not publicly documented

The following facts about the Vantage Radiance Plus RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Vantage Radiance Plus RTP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Vantage Radiance Plus RTP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Vantage Radiance Plus RTP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Vantage Radiance Plus RTP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Vantage Radiance Plus RTP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]fabsurplus.comfabsurplus.com
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Last updated Oct 4, 2026.

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