Applied Materials
UVision SP 200 Brightfield Wafer
Applied Materials UVision SP 200 Brightfield Wafer is a brightfield wafer inspection tool for 12-inch wafers. Applied Materials UVision SP 200 Brightfield Wafer scans a wafer in a meander path. Applied Materials UVision SP 200 Brightfield Wafer uses a laser light source at 266 nm.[1][2]
What it is
The Applied Materials UVision SP 200 is a brightfield wafer inspection tool for metrology and inspection.[1][2]
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical4
- 50/60 Hz[1]
Wafer handling8
- Designed to inspect pattern wafers, but it can also inspect bare and unpatterned wafers[1]
- On pattern wafers capable of detecting defects of 25 nm with 90 %[1]
- Inspection capability
- Designed to inspect pattern wafers, bare wafers, and unpatterned wafers[1]
- Defect detection
- On pattern wafers capable of detecting defects of 25 nm with 90% capture rate[1]
Optics & imaging2
Control & software1
- Capture Rate (Data from D&E recipe[1]
Configuration & options8
- 5 Wire[1]
- Die to Die ” and Cell to Cell ” comparison capability[1]
- Can use reflected --( BrigthField ) and scattered signal (GF = GreyField ) in parallel for detection[1]
- Detection mode
- Can use reflected brightfield and scattered signal (greyfield) in parallel for detection[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the UVision SP 200 handle?
What kind of wafers can the UVision SP 200 inspect?
The UVision SP 200 is designed to inspect pattern wafers, and it can also inspect bare and unpatterned wafers.[1][2]
Not publicly documented
The following facts about the UVision SP 200 Brightfield Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UVision SP 200 Brightfield Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UVision SP 200 Brightfield Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UVision SP 200 Brightfield Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the UVision SP 200 Brightfield Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the UVision SP 200 Brightfield Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 8, 2026.
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