Waferpedia

Applied Materials

Centura Enabler 300 Dry

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Applied Materials Centura Enabler 300 Dry Etch is a dry etching tool for semiconductor manufacturing.[1]

The Centura Enabler 300 is configured for 12-inch wafers.[1]

How it works

General reference — not yet source-verified

A dry etcher removes material from a wafer using a process gas rather than liquid chemistry.

The etch chamber creates a controlled plasma environment that directs reactive species toward exposed regions on the wafer surface.

Where it fits in the process flow

General reference — not yet source-verified

The tool follows lithographic pattern definition and precedes later cleaning, metrology, and downstream process steps that use the etched features.

Applications

General reference — not yet source-verified

Dry etch tools of this class are used for anisotropic material removal in integrated-circuit fabrication.

What do the numbers mean?

Wafer handling1

Wafer sizes
12 inch[1]
Accurate?

Configuration & options4

OEM
Applied Materials[1]
Accurate?
Model
Centura Enabler 300[1]
Accurate?
Equipment type
Dry Etcher[1]
Accurate?
Vintage
2004[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model designation?

The model designation is Centura Enabler 300.[1]

What type of equipment is this?

The equipment is a dry etcher.[1]

Not publicly documented

The following facts about the Centura Enabler 300 Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura Enabler 300 Dry are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura Enabler 300 Dry are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura Enabler 300 Dry are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura Enabler 300 Dry are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura Enabler 300 Dry is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Oct 3, 2026.

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