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Applied Materials

Centura

DepositionApplied Materials Centura family
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Centura — Inventory photo
Fig. 01CenturaInventory photo[1]

What it is

General reference — not yet source-verified

The Applied Materials Centura is a semiconductor deposition system used for chemical vapor deposition.

How it works

General reference — not yet source-verified

A chemical vapor deposition system introduces process gases into a controlled chamber and forms a thin film on the wafer surface by reaction or decomposition at the substrate.

A deposition platform of this class is built to control gas delivery, chamber conditions, and wafer exposure so that films can be applied repeatably across the wafer.

Where it fits in the process flow

General reference — not yet source-verified

The Centura sits in the film-deposition portion of semiconductor manufacturing, after earlier wafer preparation steps and before later patterning or etch steps that use the deposited film.

A deposition tool of this class is used when a process needs a new material layer on the wafer rather than material removal.

Applications

General reference — not yet source-verified

A CVD deposition system is generally used to form insulating, conductive, or barrier films in integrated-circuit fabrication.

  • Chemical vapor deposition
  • Plasma etching

What do the numbers mean?

Wafer handling2

Wafer size
8 inch[6]
Accurate?
Wafer size
12 inch[8]
Accurate?

Gas & chemistry2

Process type
Chemical vapor deposition (CVD)[6]
Accurate?
Equipment type
CVD (Chemical Vapor Deposition)[6]
Accurate?

Configuration & options15

Ultima+ HDP[6]
Accurate?
3 C/H, DxZ[7]
Accurate?
3 C/H, EMAX CT Plus[8]
Accurate?
SIGEN 4CH[9]
Accurate?
OEM
Applied Materials[6]
Accurate?
Model
Centura[6]
Accurate?
Process type
Etching[8]
Accurate?
Variant
Ultima+ HDP (8-inch CVD)[6]
Accurate?
Variant
DxZ (8-inch CVD, 3 C/H)[7]
Accurate?
Variant
EMAX CT Plus (12-inch Etcher, 3 C/H)[8]
Accurate?
Variant
SIGEN 4CH (12-inch CVD)[9]
Accurate?
Product details
8" Ultima+ HDP 2002 Vintage[6]
Accurate?
Product details
8" 3 C/H, DxZ 2000 Vintage[7]
Accurate?
Product details
12" 3 C/H, EMAX CT Plus 2003 Vintage[8]
Accurate?
Product details
12" SIGEN 4CH[9]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Ultima+ HDP—2002—Equipment inventory listing[6]
3 C/H, DxZ—2000—Equipment inventory listing[7]
SIGEN 4CH———Equipment inventory listing[9]
Centura CVD (Chemical Vapor Deposition)—2000Listed with product details including 8" Ultima+ HDP, 8" 3 C/H DxZ, and 12" SIGEN 4CH.Equipment inventory listing[6]
Centura Etcher—2003Listed as an etcher variant with 12" wafer size and EMAX CT Plus.Equipment inventory listing[8]
Centura CVD Ultima+ HDP—20028-inch CVD configuration; described as Ultima+ HDP with 2002 vintage.Equipment inventory listing[6]
Centura CVD DxZ—20008-inch CVD configuration; described as 3 C/H DxZ with 2000 vintage.Equipment inventory listing[7]
Centura Etcher EMAX CT Plus—200312-inch etch configuration; described as 3 C/H EMAX CT Plus with 2003 vintage.Equipment inventory listing[8]
Centura CVD SIGEN 4CH——12-inch CVD configuration; described as SIGEN 4CH.Equipment inventory listing[9]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Process typeChemical vapor deposition (CVD)[6]
  • Equipment typeCVD (Chemical Vapor Deposition)[6]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Applied Materials Centura PCB BoardsIn Productionsource[10]
  • Applied Materials Centura Spare PartsIn Productionsource[11]
  • Applied Materials Centura PCB BoardIn Productionsource[12]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What manufacturer produces the Centura deposition system?

Applied Materials.[6][13][7][9]

What type of deposition does the Centura system perform?

The Centura system performs Chemical Vapor Deposition (CVD).[6][13][7][9]

Not publicly documented

The following facts about the Centura are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Centura are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the Centura are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

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Sources & citations

Sources (15)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]inventory listing
  10. [10]Equipment inventory listing
  11. [11]Equipment inventory listing
  12. [12]Equipment inventory listing
  13. [13]Equipment inventory listing
  14. [14]Equipment inventory listing
  15. [15]Fab.nano Equipment Rates START.nano March 2026 0 — nanousers.mit.edunanousers.mit.edu
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Last updated Oct 8, 2026.

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