AJA
A3CV
The AJA A3CV is a series of magnetron sputtering sources. The AJA A3CV fits multiple target modules onto a common source head subassembly. The AJA A3CV is available in HV and UHV mounting versions.[1][2][3]
What it is
The AJA A3CV is a magnetron sputtering source for vacuum thin-film deposition. The A3CV series uses a common source head subassembly that can accept multiple target modules, and the series is offered in high-vacuum and ultra-high-vacuum mounting versions.[2][1]
How it works
The A3CV uses a common source head subassembly that can accept multiple target modules. The A3CV series is compatible with both radio-frequency and direct-current operation.[2]
The AJA sputter-source family uses modular magnet arrangements, integral gas injection, chimney structures, and target mounting designed for heat transfer and target exchange. The family is built for high-vacuum and ultra-high-vacuum operation and includes configurations for balanced and unbalanced magnetron use.[1][2]
Applications
The AJA sputter-source family is used for semiconductor conductive metal films, resistive metal films, and insulating films. The family is also used for transparent electrical conductors, optical communications coatings, wear-resistant films, lens coatings, precious metals, thin-film sensors, medical coatings, magnetic storage media, and photovoltaic thin films.[1][2]
- R&D applications
- sputtering various size targets
What do the numbers mean?
Power & electrical4
- Optional features
- gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies[1]
Gas & chemistry1
Configuration & options13
- Target sizes mentioned
- large magnetic, small precious metal, standard size, and custom size targets[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| A3CV series | — | — | Available in HV and UHV mounting versions; optional gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies are mentioned. | web.archive.org[1] |
| 2" version | — | — | Shown as a source variation with manual tilt and gas injection chimney. | web.archive.org[1] |
| 2.5" version | — | — | Shown on a 6" CF flange with gas injection chimney. | web.archive.org[1] |
| 3" magnetic material version | — | — | Shown as a magnetic material version. | web.archive.org[1] |
| 2" module | — | — | Shown as a source variation. | web.archive.org[1] |
| magnetic version core | — | — | Shown as a source variation. | web.archive.org[1] |
| magnetic version module | — | — | Shown as a source variation. | web.archive.org[1] |
| 2 in version | — | — | Shown as a source variation with manual tilt and gas injection chimney. | web.archive.org[1] |
| 2.5 in version | — | — | Shown on a 6 in CF flange with gas injection chimney. | web.archive.org[1] |
| 3 in magnetic material version | — | — | Shown as a magnetic material version. | web.archive.org[1] |
| 2 in module | — | — | Shown as a module variation. | web.archive.org[1] |
What replaced it?
Related models
- siblingAJA A300-XP— The A3CV series is described alongside the A300-XP series and as featuring the same modular magnet array.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the A3CV are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the A3CV are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the A3CV are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the A3CV are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the A3CV is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the A3CV are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]HV R&D SPUTTERING SOURCES: STILETTO SERIES - AJA International — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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