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Advanced Energy

Cesar RF Power

Advanced Energy Cesar RF Power family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Advanced Energy Cesar RF Power is a Class E switched-mode RF power supply family. The Advanced Energy Cesar RF Power is designed for semiconductor production and general plasma processing. The Advanced Energy Cesar RF Power line includes models with output frequencies from 2 MHz to 40.68 MHz and output power from 300 W to 5 kW.[1][2]

Cesar RF Power — Inventory photo
Fig. 01Cesar RF PowerInventory photo[3]

What it is

The Advanced Energy Cesar RF Power is an RF power supply used in semiconductor production and general plasma processing.[2]

The Cesar generator is a compact rack-mountable unit with an air-cooled configuration and rear-panel power and interface connections.[2]

How it works

The Cesar generator is a Class E switched-mode amplifier for radio frequency power delivery.[2]

The Cesar generator uses parallel excited circuitry and supports forward power, real power, and DC bias regulation modes.[2]

Where it fits in the process flow

The Cesar generator supports power delivery to the process step where plasma is generated or sustained, and that step may precede or accompany etch, deposition, cleaning, or surface treatment operations.[2]

Applications

The Cesar generator is used for sputtering, reactive ion etching, RF bias, plasma polymerization, plasma surface treatment, and CO2 laser systems.[2]

What do the numbers mean?

Power & electrical4

Product type
RF power supply / RF power generator[1]
Accurate?
Output frequency range
2, 4, 13.56, 27.12, and 40.68 MHz models[1]
Accurate?
Power output range
300 W to 5 kW[1]
Accurate?
Input voltage
200 and 400 VAC[1]
Accurate?

Control & software1

Control mode
Forward power, real power, or DC bias regulation mode[2]
Accurate?

Configuration & options2

Cooling
Air-cooled[2]
Accurate?
Mounting
19-inch rack-mountable[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Product typeRF power supply / RF power generator[1]
  • Output frequency range2, 4, 13.56, 27.12, and 40.68 MHz models[1]
  • Power output range300 W to 5 kW[1]
  • Input voltage200 and 400 VAC[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What output frequencies are available for the Cesar platform?

The Cesar platform includes models at 2 MHz, 4 MHz, 13.56 MHz, 27.12 MHz, and 40.68 MHz.[1]

What power range does the Cesar platform cover?

The Cesar platform covers power output from 300 W to 5 kW.[1]

What input voltage options are available?

The Cesar platform uses 200 VAC and 400 VAC input options.[1]

What user interfaces and communications are available?

The Cesar platform includes an active front panel, analog I/O, and serial I/O options such as RS-232, Ethernet, and Profibus.[1]

Not publicly documented

The following facts about the Cesar RF Power are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Cesar RF Power are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Cesar RF Power are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Cesar RF Power are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Cesar RF Power are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Cesar RF Power is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]advancedenergy.com — advancedenergy.comadvancedenergy.com
  2. [2]idealvac.com — idealvac.comidealvac.com
  3. [3]Inventory photo
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Last updated Oct 8, 2026.

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