Manufacturer
VAT
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3 entries
- Ultra High Vacuum ThermalVAT
The VAT Ultra High Vacuum Thermal Test Chamber is a test chamber for semiconductor manufacturing equipment.
CategoryTest & Probe - PM 5 Adaptive Pressure ControllerVAT
The VAT PM 5 Adaptive Pressure Controller is a controller used to control individual VAT series 64 servo-stepper throttle gate valves to adjust pumping speed throughput and process chamber pressure.
- 610 PB 26 NM 0002 903 PartVATCategoryLab & Support Equipment
