Waferpedia

Manufacturer

Kawasaki

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5 entries

  1. 3 NS 411 B F 006 Atmospheric Wafer RobotKawasaki
    CategoryCMP
  2. NX 520 B-A 001 RobotKawasaki
  3. 3 NS 411 B F 003 Atmospheric Wafer RobotKawasaki

    The Kawasaki 3 NS 411 B F 003 Atmospheric Wafer Robot is a robotic handling system for 12-inch wafers, designed for use in CMP processes.

    CategoryCMP
  4. 3 NX 540 B A 302 Atmospheric Wafer RobotKawasaki

    The Kawasaki 3 NX 540 B A 302 is an atmospheric wafer robot described as compatible with AMAT Producer.

    CategoryLab & Support Equipment
  5. 3 NX 520 B A 008 Atmospheric Wafer RobotKawasaki

    The Kawasaki 3 NX 520 B A 008 is an atmospheric wafer robot manufactured by Kawasaki for 12-inch wafers.