Manufacturer
Heidelberg Instruments
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3 entries
- VPG200Heidelberg Instruments
Heidelberg Instruments VPG200 is a laser pattern generator used for mask production, direct exposure on SEMI-standard wafers, and mask reticles.
CategoryLithographyWafer100mmNode600 nm minimum resolution with thin photoresist (< 1 µm) - MLA150Heidelberg Instruments
The Heidelberg Instruments MLA150 is a mask-less direct-write lithography system for exposing photoresist on substrates without a photomask.
CategoryLithographyWafer150mm - DWL66Heidelberg Instruments
Heidelberg Instruments DWL66 is a high-resolution direct write pattern generator for direct writing on various substrates and mask making.
CategoryLithographyWafer6"
