Tool family
Zygo AutoKMS 100
Zygo AutoKMS 100 SEM.
Models in this family
The Zygo AutoKMS 100 is a scanning electron microscope (SEM) used as a reticle CD-SEM for metrology and inspection of 8-inch wafers.
Tool family
Zygo AutoKMS 100 SEM.
The Zygo AutoKMS 100 is a scanning electron microscope (SEM) used as a reticle CD-SEM for metrology and inspection of 8-inch wafers.
