Waferpedia

Tool family

YES 58TASM

YESVapor Prime / Image Reversal / Silylation system1 entry

The YES-58TASM is listed as a Vacuum Bake / Vapor Prime product model that supports Vapor Prime, Image Reversal, and Silylation modes.

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Models in this family

  1. 58TASM

    The YES-58TASM is a Vapor Prime, Image Reversal, and Silylation system from Yield Engineering Systems, supporting wafers up to 6 inches.