Waferpedia

Tool family

YES 253B-2-4CF-2

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve for regulating or shutting off gas removal from a vacuum chamber when used with an MKS controller.

Models in this family

  1. The MKS Type 253B Exhaust Throttle Valve is a butterfly valve for regulating or shutting off gas removal from a vacuum chamber when used with an MKS controller.

    Cited variants

    DesignationGenerationVintageChangesSource
    253B-2-4CF-2——CF flange configuration with 2.000 in inside diameter, 4½ in CF mounting flange, 4.47 in outside diameter, 6 bolt holes, and 0.26 in bolt hole diameter.nanofab.utah.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu