Waferpedia

Tool family

YES 253B-1-2CF-2

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve used to regulate removal of gas from a vacuum chamber when used with an MKS controller.

Models in this family

  1. The MKS Type 253B Exhaust Throttle Valve is a butterfly valve used to regulate removal of gas from a vacuum chamber when used with an MKS controller.

    Cited variants

    DesignationGenerationVintageChangesSource
    253B-1-2CF-2——CF flange variant with 2.000 in (50.8 mm) inside diameter, 2¾ in CF mounting flange, 2.75 in (69.9 mm) outside diameter, 1.25 in (31.8 mm) thickness, 6 bolt holes, and no flapper seal.nanofab.utah.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu