Tokyo Electron Indy

Models in this family

1. Indy

   The Tokyo Electron Indy is a deposition tool, and one source identifies an Indy-B-L variant used for a HiK dielectric process.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Indy-B-L	—	2010–2010	HiK dielectric process	agsemiconductor.com[1]

2. Indy B L

   The Tokyo Electron Indy B L is a furnace used for thermal processing, including processes such as N2O, NH3, SiH2Cl2, SiH4 (PAC module), DCS Nitride, and D-Poly, with vintages from 2006 to 2010.

3. Indy I L

   The Tokyo Electron Indy I L is a 12-inch furnace with source-listed vintage years of 2006 and 2007 in the provided records.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Indy I L (SEED Poly)	—	2007	SEED Poly process	Equipment inventory listing[2]
   Indy I L (LT ALD SiN)	—	2006	LT ALD SiN process	Equipment inventory listing[3]
   Indy I L (NH3/DCS/SiGe/C2H4/HF/N2/TiCl3)	—	2006	NH3, DCS, (SiGe), C2H4, HF with N2, TiCl3 Liquid process	Equipment inventory listing[4]

4. Indy Plus

Sources