Waferpedia

Tool family

Tokyo Electron Expedius

Tokyo ElectronWet Processing / Clean2 entries
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Models in this family

  1. Expedius

    The Tokyo Electron Expedius (also designated UW200Z) is a stand-alone wafer scrubber system based on the CLEAN TRACK MARK 7 platform, capable of cleaning both sides of 5- to 8-inch wafers.

  2. Expedius Plus

    Tokyo Electron Expedius Plus is a wet bench for pre-diffusion clean applications.

All entries

  1. ExpediusTokyo Electron

    The Tokyo Electron Expedius (also designated UW200Z) is a stand-alone wafer scrubber system based on the CLEAN TRACK MARK 7 platform, capable of cleaning both sides of 5- to 8-inch wafers.

    CategoryWet Processing / Clean
    17 specs
  2. Expedius PlusTokyo Electron

    Tokyo Electron Expedius Plus is a wet bench for pre-diffusion clean applications.

    CategoryWet Processing / Clean
    34 specs