Waferpedia

Tool family

Thermo Fisher Scientific FEI Nova NanoLab 600 i Dual Beam FIB

Thermo Fisher1 entry

Models in this family

  1. The Thermo Fisher Scientific / FEI Nova NanoLab 600 i is a Dual Beam FIB (Focused Ion Beam) system equipped with optional Edax EDX Detector and Raith capabilities.